5 ground requirements, Warning - risk of electric shock – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
2.1.1.5 Ground Requirements
Low impedance cables or straps must be used to connect the chassis of all control
components to a common ground point on the vacuum chamber. The common
ground point must be connected to earth ground. See
for the earth ground requirement.
Solid copper straps at least 12.7 mm (0.5 in.) wide and approximately
0.56 mm (0.022 in.) thick (as short as possible) are recommended where RF is
present. This is particularly important in high-noise e-beam systems.
See
for the recommended grounding method.
The oscillator is grounded to the IQM-233 card and crystal sensor through the
BNC cables and SMA/BNC adapter.
The crystal sensor is typically grounded to the wall of the vacuum system. If the
sensor feedthrough is not properly grounded to earth through the vacuum
system, connect a copper strap between the feedthrough and the common
ground point on the vacuum system.
WARNING - Risk Of Electric Shock
The computer in which the IQM-233 card is installed must
be connected to earth ground through a sealed
three-conductor power cable plugged into a socket outlet
with a protective ground terminal. The computer must
also be connected to the common ground point, shown
in
.
Extension cables must have three conductors including
a protective earth ground.
Figure 2-2 System grounding diagram
Earth
Vacuum System
Ground
Oscillator
Sensor
Feedthrough
Computer
Source
IQM-233
3-Conductor
Card
Copper Straps to
Common Ground
and Cables
Source Output
Cable
Power Cable
Power Supply