INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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07
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IQM-233 Operating Manual
5
Connect the other end of the short BNC cable to the feedthrough of the crystal
sensor. See
6
Install a new 5 MHz or 6 MHz crystal into the sensor.
NOTE: Refer to the sensor’s operating manual for crystal installation
instructions.
Figure 2-9 Oscillator connection to sensor feedthrough
CAUTION
For proper performance of the IQM-233 card, the crystal
sensor in-vacuum cable (Front Load and Sputtering
sensors) or electrical conduit tube (Cool Drawer and
Bakeable sensors) should not exceed 78.1 cm (30.75 in.).
Use only the short BNC cable (15.2 cm (6 in.)) included in
the oscillator kit to connect the oscillator to the crystal
sensor.
7
Repeat steps 1 through 6 for any additional sensors to be connected to the
IQM-233 card.
8
Start the IQM-233 Standard software.
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