INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 49)

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IQM-233 Operating Manual
3.3.3.1.1 Log
Data logging (see section 3.3.4.3, Global Operating Functions, on page 3-22 )
allows rate, thickness, frequency, and life data, for individual sensors and
multiple sensors mapped to outputs (sensor averaging), to be saved to a .csv
format data log file.
Click Setup >> Log on the menu bar to display the Save As window. In the File
name: text box, type a name for the data log file and browse for a suitable
folder. Click Save to save the data log file. See
Figure 3-10 .
Figure 3-10 Log Save As window