INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 48)

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IQM-233 Operating Manual
Operating functions allow data logging of thickness, rate, frequency, and life
information, starting and stopping of the readout information, and zeroing of the
thickness values. See
section 3.3.4.3, Global Operating Functions, on page 3-22 .
In addition to the information displayed by the Sensor Information pane, the
Source Information pane displays material thickness, deposition rate, rate
deviation, and source power, for up to three sources. See
section 3.3.4.2, Source
Information Pane Readouts, on page 3-21 .
When the Source Information pane is displayed, additional operating functions
allow selection of source control mode, starting and stopping of source power,
holding and resuming of a process, and zeroing of the thickness values in the
Source Information pane. See
section 3.3.4.4, Source Control Operating
Functions, on page 3-23 .
NOTE: IQM-233 Standard software must be configured before monitoring or
controlling a deposition. See section 3.3.3 .
3.3.3 Software Configuration
Configure the Setup parameters (see section 3.3.3.1 ), Map Sensor parameters
(see section 3.3.3.2 ), and Source Control parameters (see section 3.3.3.3 ). Save
the configured parameters as a configuration file (see section 3.3.3.4 ).
3.3.3.1 Setup
On the menu bar, click Setup to access options to control Log, General, Sensor,
and Source settings. See
Figure 3-9 .
Figure 3-9 Setup list
 Log, see section 3.3.3.1.1
 General, see section 3.3.3.1.2
 Sensor, see section 3.3.3.1.3
 Source, see section 3.3.3.1.4