INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 61)

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IQM-233 Operating Manual
3.3.4.2 Source Information Pane Readouts
Figure 3-21 Source Information pane - readouts
Output Fields
The Output 1, Output 2, and Output 3 fields display the following readouts:
Thickness (kÅ) . . . . . . . . . . . . . . . . 0.0000 to 999.90 kÅ
The thickness of material deposited on the substrate, based on the thickness
measured by the sensor, or sensors, mapped to the corresponding output. If
multiple sensors are mapped to an output, the thickness readout is an average
of the mapped sensor thicknesses.
Rate (Å/s). . . . . . . . . . . . . . . . . . . . . –999.9 to 999.9 Å/s
The rate of deposition at the substrate, based on the rate measured by the
sensor, or sensors, mapped to the corresponding output. If more than one
sensor is mapped to an output, the output's displayed rate is an average of the
mapped sensor rates.
Rate Dev (%) . . . . . . . . . . . . . . . . . . –100% to 100%
The percentage deviation of the Rate ( Å/s) display from the desired rate setting
in the Source Setup window.
Power (%) . . . . . . . . . . . . . . . . . . . . 0 to 100%
The percentage of source output voltage relative to the Full Scale (V) voltage
setting for the corresponding output channel.