INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 81)

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SQS-242 Operating Manual
5.8.4 Query/Update Film
@QF;;;
@UF;;;;
Note: =0 is active layer
where is:
01
P Term
02 I Term
03 D Term
04 Shutter Delay Status (0/1)
05 Shutter Timeout
06 Shutter Accuracy
07 Control Error Status (0/1/2)
08 Control Error Accuracy
09 Rate Sampling Status (0/1/2)
10 Sample Accuracy
11 Sample Time
12 Sample Hold
13 Ramp 1 Power
14 Ramp 1 Time
15 Soak 1 Time
16 Ramp 2 Power
17 Ramp 2 Time
18 Soak 2 Time
19 Feed Power
20 Feed Ramp Time
21 Feed Time
22 Idle Power
23 Idle Ramp Time
24 Output (1-6)
25 Source Index (obsolete)
26 Max Power
27 Slew Rate
28 Material
3n Tooling n (n=1 to 8)
40 AutoSoak2 (0/1)
5.8.5 Query Utility
@QU;
01
SQM242 DLL Version
02 SQM242 Mode (0/1)
03 SQM242 Period
04 SQM242 Filter
05 SQM242 Number of Cards Installed
06 Front Panel Enabled (0/1)
07 Application Visible (0/1)
11 SQS-242 Software Version
12 SQS-242 Operating System
13 SQS-242 Computer Name