INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual

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SQS-242 Operating Manual

If the software is configured for dual sensors, the relay operation is considerably
different. Dual sensors use pairs of sensors (i.e., Sensor 1 and 2, or Sensor 3 and
4). With Sensors 1 or 3 selected, the associated relay contacts are open. If a
Crystal Fail is detected, the relay contacts for the failed sensor will close to select
the second sensor in the Dual Sensor assembly for the duration of the film.

Xtal All Good and Xtal All Fail Relays

These two relays provide an indication of the general health of your sensors. If
the Xtal All Good Relay is closed, then all enabled sensors are returning a valid
reading. If the Xtal All Fail Relay is closed, none of the enabled sensors are
returning a valid reading.

Process Stopped and Running Relays

These relays indicate the overall status of the process. The Process Running
relay closes as soon as Start Process is selected (by front panel or digital input),
and opens when Abort Process is selected. Even if a layer is stopped within a
process, the Process Running relay remains closed until the last film of a
process has finished. The Process Stopped relay contacts behave in the
inverse manner.

Layer Stopped and Running Relays

The Layer Running relay closes as soon as Start Layer is selected (by front
panel or digital input), and opens when Stop Process is selected. The Layer
Stopped relay contacts behave in the inverse manner.

Deposit Phase Relay

This relay indicates that you are in the deposit phase of a film. It is like having
the two Source Shutter Relays connected in parallel. If you have shutter delay
enabled, this relay will wait until the end of the shutter delay before going active.

Pre-Cond Phase Relay

This relay closes for the preconditioning phases (Ramp1, Soak1, Ramp2,
Soak2) of a film.

Soak Hold Phase Relay

This relay closes for the Soak and Hold phases after deposition.

Process Active Relay

This relay action is similar to the Process Running relay, except it will open if
the process is temporarily halted for any reason, e.g. a Manual Start layer.

Manual Mode Relay

Closes when the program is placed in Manual mode.