INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
# Processes . . . . . . . . . . . . . . . . . . . Unlimited
# Layers . . . . . . . . . . . . . . . . . . . . . . Unlimited
# Films . . . . . . . . . . . . . . . . . . . . . . . Unlimited
# Rate Ramps . . . . . . . . . . . . . . . . . Unlimited
# Sensors (Dual) . . . . . . . . . . . . . . . 1 to 8 (4 Dual)
# Sources . . . . . . . . . . . . . . . . . . . . . 1 to 6
Layer Parameters
Film . . . . . . . . . . . . . . . . . . . . . . . . . Any defined
Output . . . . . . . . . . . . . . . . . . . . . . . 1 to 6
Input . . . . . . . . . . . . . . . . . . . . . . . . . Sensor(s)
Timed Power
Analog Input
SetPoint . . . . . . . . . . . . . . . . . . . . . . 0.00 to 999.99 Å/s
0.00 to 100.00% Power
0.00 to10.00 V(dc)
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Time EndPoint . . . . . . . . . . . . . . . . . 0 to 30000 s
Thickness EndPoint . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Start Mode . . . . . . . . . . . . . . . . . . . . Auto/Manual
Source Indexers . . . . . . . . . . . . . . . . 6, Index 1-16
Layer Indexers . . . . . . . . . . . . . . . . . 3, Index 1-16
Rate Ramp Start. . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Rate Ramp Time . . . . . . . . . . . . . . . 0 to 1000 s
New Rate . . . . . . . . . . . . . . . . . . . . . 0.00 to 999.99 Å/s
Film Parameters
Name . . . . . . . . . . . . . . . . . . . . . . . . 12 characters
Ramp Time (1,2) . . . . . . . . . . . . . . . 0 to 30000 s
Soak Power (1,2) . . . . . . . . . . . . . . . 0.0 to 100.0%
Soak Time (1,2) . . . . . . . . . . . . . . . . 0 to 30000 s
Shutter Delay Time. . . . . . . . . . . . . . 0 to 200 s
Shutter Delay Error . . . . . . . . . . . . . 0.0 to 30.0%
P Term . . . . . . . . . . . . . . . . . . . . . . . 1 to 9999