INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 44)

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SQS-242 Operating Manual
accuracy is achieved, and maintained for Hold seconds, then the substrate shutter
opens and deposition begins. The Thickness reading is zeroed at the end of the
shutter delay period.
Rate Sampling: Rate sampling can extend the life of crystals. With rate sampling,
the deposition rate is sampled for a period of time, then the sensor shutter is
closed. Power is then held at the same level as the final power setting during the
sample period.
Continuous selects no sampling; the sensor shutter remains open during
deposition. Accuracy Based sampling opens the shutter until the desired accuracy
is reached, leaves the shutter open for Sample time, then closes the shutter and
holds power constant for Hold time. Time Based sampling opens the shutter for a
fixed period of time then closes it for a fixed time.
3.5.1.4 Condition Tab
Before the deposition begins, it is often necessary to PreCondition the source
material. This places the system at the proper power level to achieve rapid PID
control when deposition begins. See
Figure 3-12 .
Figure 3-12 Condition tab