INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 52)

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SQS-242 Operating Manual
3.5.4.2 Sensors Tab
Figure 3-19 Sensors tab
Name: A meaningful name assigned to each sensor. For clear display, keep the
name to less than 8 characters.
Physical Sensor: Up to six SQM-242 cards (physical sensors 1 to 24) may be
installed in a computer. However, the SQS-242 software can display a maximum of
8 sensors simultaneously. Use this dropdown to assign a “physical” sensor to a
“display” sensor.
Dual: Indicates that a pair of sensors is set up as primary/secondary duals. When
a primary sensor fails, the SQS-242 switches to the secondary sensor.
Monitor Output: Select the output that each sensor is positioned to measure. The
rate and thickness displayed by the sensor will be calculated based on the material
assigned to the selected output.
Control Checkboxes: Click Rate to assign the sensor to the PID rate control loop
for the assigned output during deposition. Click Thk to use the sensor for Thickness
endpoint detection. Typically you will check both boxes so that the sensor controls
to rate setpoint and detects the thickness endpoint. If multiple sensors are
assigned to control the same output, the sensor readings are averaged when
calculating rate and thickness.
Uncheck both boxes to have a sensor monitor an output, without controlling
deposition rate or stopping when final thickness is reached.