2 sqm-242 deposition control card – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
The six Soft Keys provide easy access to the common operating functions. A single
tabbed dialog box provides all of the settings required for a thin film process.
Material parameters, sensor/source setup, pre/post conditioning, and error
conditions are all visible on a single dialog box. Process settings, numeric data, and
graphical displays are displayed during all phases of deposition.
The SQS-242 software stores process parameters in a Microsoft Access
compatible database. The SQS-242 software can be controlled from another
computer using the RS-232 or Ethernet command protocol.
1.2 SQM-242 Deposition Control Card
The SQM-242 is a PCI expansion card for use in computers running the Microsoft
®
Windows
operating system. See
. Each card measures up to four
quartz sensors via BNC inputs, and supplies the control signal for two evaporation
sources via a ¼” stereo phone plug. Up to six SQM-242 cards can be installed in a
computer. A single SAM-242 piggyback card with four analog inputs and two
control outputs can also be installed.
Figure 1-2 SQM-242 Card
Consult the separate SQM-242 card Operating Manual for detailed information on
installing and using the SQM-242 and the SAM-242 cards.