INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 46)

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SQS-242 Operating Manual
Max Power: The maximum output power allowed for the selected output. The full
scale output voltage is a function of the deposition power supply input
specifications, and is set in the Edit System menu, Outputs tab. Max Power
controls the maximum % of the full scale power that can be used by this film in all
phases (PreConditioning, Deposition, and Feed/Idle).
Slew Rate: The maximum power change allowed on an output, per second. If rate
ramps or PID power requirements exceed this value, an error will occur.
Sensor Tooling: Adjusts for sensor measured deposition rates that differ from the
substrate deposition rate. For example, if the sensor sees only 50% of the
substrate rate, set the value to 200%. Setting Tooling to 0% causes a sensor to be
ignored for this film.
The System Setup selection on the Layer tab establishes which sensor(s) are
visible. Only those sensors “mapped” to the layer’s output are visible.
3.5.1.6 Errors Tab
Several source or sensor error conditions are possible during deposition. This tab
establishes the program's response to errors. See
Figure 3-14 .
NOTE: It is best to leave all error settings, except Crystal Fail, disabled until you
are confident of the stability and repeatability of your process.
Figure 3-14 Errors tab