INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 18)

2 - 4
IP
N 07
4-
55
1-
P1
A
SQS-242 Operating Manual
2.2.3 Edit Rate Ramps
A thin-film deposition process consists of one or more layers of material
evaporated onto a substrate.
Figure 2-4 illustrates a complete deposition cycle for
a single layer. Refer to this diagram as we set the remaining parameters.It may be
desirable to vary the deposition rate during a layer. For example, to deposit slowly
at first, then more quickly once the initial material is deposited.
Figure 2-4 Complete Deposition Cycle for a Single Layer
13 Click Rate Ramps. See Figure 2-5 .
Figure 2-5 Rate Ramps tab
14 Click Insert Ramp.
15 Set Start Thickness to 0.400 kÅ.
16 Set Ramp Time to 5 seconds.
17 Set New Rate to 15 Å/s.
NOTE: Settings on the Layer and Rate Ramp tabs must be set for each layer in
a process. Settings on the remaining four tabs (Deposit, Condition,
Source/Sensor, and Errors) correspond to the Film that was selected on
the Layer tab. This allows a Film’s settings to be used in a number of
layers, without the need to individually adjust each layer.