INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 24)

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SQS-242 Operating Manual
2.4 SoftKey Functions
As you have seen, the SoftKey functions remain constant during deposition. Spend
a few minutes to become familiar with each of these SoftKey functions.
START PROCESS
Starts the first layer of a process when START is pushed. If AUTO
MAN is shown
on the third SoftKey (AUTO mode) the process starts PreConditioning. If
MAN
AUTO is shown on the third SoftKey (MANUAL mode) the process
immediately starts in the Deposition phase.
ABORT PROCESS
Aborts the process. The process can only restart at the first layer.
START LAYER
Starts a stopped layer, or a layer that has been designated Manual Start in the
process database. Starts the layer based on the state of the AUTO >> MAN
SoftKey as described above.
STOP LAYER
Stops the current layer. Also changes the function of the first SoftKey to NEXT
LAYER.
NEXT LAYER
Abandons the current layer and moves to the next layer in the process. If it is the
last layer of a process, the same as pushing ABORT PROCESS.
AUTO MAN
When AUTO MAN is pushed, the source output is set to manual control. You may
adjust the output using the settings ribbon. Because the PID loop is not running,
you can manually set the output power to different levels and observe the
associated deposition rate.
MAN AUTO
Returns the output to PID loop control. If the process is running (ABORT
PROCESS and STOP LAYER shown on the first two SoftKeys) deposition
continues. If the process is stopped, sets the output to zero and awaits a start
command.
ZERO
Resets the thickness reading to zero.
NEXT FILM
Sequences the setting ribbon through each Film in a codeposition layer.
NEXT SETTING
When the settings ribbon is shown, sequences the setting knob action through
each of the displayed parameters.