INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
8
Save Edits
Click Close Form or press the first SoftKey to save this two-layer codeposition
process. Answer Yes if it displays the Do you want to change…. message box
to make this the current process.
9
Start Process
Press the START SIMULATE SoftKey to start the first layer preconditioning
phases. Note that two outputs are displayed for this codeposition layer.
Preconditioning of the two materials is entirely independent. If the
preconditioning of one layer takes longer than the other, the start times are
adjusted so that the end times coincide.
When preconditioning ends, codeposition of the two materials begins.
Your response should be similar to the graph shown in
(your vertical
scale may be slightly different). The slight ringing on the waveforms indicates some
further tuning may be desired. However, this is an example of a reasonably well
tuned loop.
Figure 2-16 Start Process Response
At 0.400 kÅ thickness, the Silver Sample deposition rate ramps down from 15 Å/s
to 0. Similarly, at 0.400 kÅ thickness the Gold Sample film ramps to a higher
deposition rate of 15 Å/s. Because the initial rate for Gold was set lower than the
initial rate for Silver, Gold reached its 0.400 kÅ thickness rate ramp trigger later in
the deposition cycle.