INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 72)

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SQS-242 Operating Manual
4.3 PLC Setup and Test
In the SQS-242 software select Edit, System, then the I/O tab. Set the Address to
match the PLC Address (usually 0). Set the Comm Port to the serial port you are
using. The COMM LED on the PLC should flash several times a second when the
Address and Comm Port are set properly.
The Test section of the I/O tab provides a means of testing your PLC
communications and digital I/O wiring. To set a relay on the PLC, go to the Digital
I/O tab and find which I/O event is assigned to that relay. On the PLC tab, select
the same event in the test dropdown, then click Set. The assigned Relay# should
close. Click Clear to open the relay.
The Indexers tab of the Edit System dialog box allows you to move a source or
substrate indexer. Select the index (i.e., pocket) to activate, then click the
appropriate move button.
4.4 5.3 PLC Programming
The PLC runs a small ladder logic program that communicates with the SQS-242
software. This program transfers external relay and input states from the PLC
connecting block to internal PLC registers. The SQS-242 software reads/writes to
those registers.
The preset functions of the SQS-242 software will be adequate for most
applications. If you need to perform additional logic functions, they can be
programmed using Omron’s CX-Programmer software. Contact INFICON for more
information on programming your PLC.
The functions of the internal PLC registers used by the standard SQS-242 program
are shown below.
PLC Register SQS-242 Function
200 Layer/Phase Register
Bits 0-9 are BCD layer number running
Bits 10-15 are BCD Phase# as shown below
00 Application Startup
09 ShutterDelay Phase
01 Program Initializing 10 Deposit Phase
02 Not Used 11 Layer Stopped
03 Not Used 12 Layer Starting
04 Process Stopped 13 Not Used
05 Ramp1 Phase 14 Feed Ramp Phase
06 Soak1 Phase 15 Feed Hold Phase
07 Ramp2 Phase 16 Idle Ramp Phase
08 Soak2 Phase 17 Idle Phase
18 Continuous Phase
201 Sensors/Outputs 1-4 Register (updated each layer)
Bits 0-7 are sensors used (1=used, 0=unused)
Bits 12-15 are outputs used, 12 is Out1, 13 is Out2, etc.