INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
We now have two layers in our process. Layer 1 has Gold being deposited from
source Output 1 and Silver is being codeposited on Output 2. Layer 2 is Gold alone.
HINT: It’s easiest to copy a layer, then paste several temporary layers of that type
as additional layers. Next, assign the films and outputs that you want to
each of these additional layers. Now use Cut Layer on the temporary
layers, and Paste CoDep to assign the film to the desired codeposition
layers. Remember that each film in a codeposited layer must be assigned
to a different source output! Review this example until you are comfortable
with these concepts.
4
Edit Layer 1 Rate & Thickness
Click Silver Sample in the list of layers. Set Initial Rate to 15 Å/s, Final
Thickness to 1.500 kÅ. Click the Rate Ramps tab and set Start Thickness to
0.400 kÅ, Ramp Time to 15 seconds, and New Rate to 0 Å/s.
5
Edit Layer 2 Rate & Thickness
Click the Layer tab, then click Layer 2 Gold Sample. Set Final Thickness to
0.5000 kÅ.
6
Set Layers to Auto Start
At the end of deposition, you may choose to have the next layer wait for a Start
Layer command, or to start automatically. Select each Layer in the layers list,
then click Auto to set that layer to start automatically.
Verify that your process matches the one shown in
.