3 edit: materials – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
Film: A dropdown box that selects the film parameters displayed in the edit film
dialog box.
Rename: Edits the name of the selected film.
New: Creates a new film.
Delete: Deletes the currently selected film from the database. A film cannot be
deleted if it is used in ANY process! To delete a film, you must first delete the film
from each process where it is used.
Copy: Creates a duplicate of the currently selected film.
The function of each Edit Films tab, and its associated controls, are identical to
those detailed in the Edit Processes section. Please consult
for that information.
3.5.3 Edit: Materials
The Edit Material dialog, see
, provides the functions needed to build a
materials database. In addition to the functions listed below, the main dialog box
SoftKeys provide capabilities to add/edit/delete materials.
Figure 3-16 Material dialog
Rename: Edits the name of the selected material.
New: Creates a new material.
Delete: Deletes the currently selected material from the database. A material
cannot be deleted if it is used in ANY process! To delete a material, you must first
delete each film where it is used.
Material: Selects a material to edit.
Density: Sets the density for this material. Material density has a significant impact
on deposition calculations.
Z-Factor: Sets the Z-Ratio, a measure of a material’s effect on quartz crystal
frequency change. Z-Ratio has no effect on measurements when using a new
crystal. If the Z-Ratio for your material is not known, using crystals with >80% life
will eliminate the effect of the Z-Ratio term.