INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 22)

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SQS-242 Operating Manual
2.3.1 Setup Displays
Click the View menu and make sure that these options are selected:
 Film Settings
 Film Readings
 Automatic
Note that the settings “ribbon” along the right side of the dialog box displays the
pre-conditioning parameters you entered in the previous section.
2.3.2 Start Process
Verify that the top SoftKey label displays START SIMULATE. If START PROCESS
is displayed, follow the instructions at the end of
section 2.1 to enable simulate
mode. Press the START SIMULATE SoftKey to start the process.
The process will start with preconditioning (i.e., Ramp1, Soak1, Ramp2, Soak2)
as shown in
Figure 2-11 . Once preconditioning is complete, the process will enter
the Deposit phase.
Figure 2-11 Preconditioning
You may want to select ABORT SIMULATE, then START SIMULATE several
times to familiarize yourself with the on-screen displays during preconditioning.
You may also want to use the settings ribbon to adjust parameters while the
process is running.