INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 66)

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SQS-242 Operating Manual
All Crystal Good
Process Running
Process Stopped
Process Active
Deposit Phase
Pre-Cond Phase
Feed/Idle Phase
Manual Mode
Max Power
Thickness Setpoint
Time Setpoint
Final Thickness
Substrate Index Select . . . . . . . . . . . 0 to 15
Source Index (Pocket) Select. . . . . . 0 to 15
Security
User Name . . . . . . . . . . . . . . . . . . . . 16 characters
Password . . . . . . . . . . . . . . . . . . . . . 8 characters
Access . . . . . . . . . . . . . . . . . . . . . . . 3 levels
Computer Interface
Type . . . . . . . . . . . . . . . . . . . . . . . . . RS-232, Ethernet, ActiveX