INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 42)

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SQS-242 Operating Manual
Substrate Index: If using a substrate indexer, assigns the substrate to one of 16
possible values. These values are set at the beginning of each layer.
User1/User2 Index: These additional values are output to the PLC for use as
needed. Common applications are to select external equipment configurations.
(The Index names, the range of values (0 to 15, or 1 to 16), and the first entry can
be customized by editing entries in the SQS242.INI file - See
section 3.8 ).
3.5.1.2 Rate Ramps Tab
Rate ramps cause changes to the deposition rate over time under PID control.
Each rate ramp has a starting thickness, an elapsed time to ramp to the new rate,
and a new rate setpoint. Each process layer can have an unlimited number of rate
ramps. See
Figure 3-10 .
Figure 3-10 Rate Ramps tab
Insert Ramp: Inserts a new rate ramp for the selected layer, at the selected
position in the rate ramps list. Existing rate ramps are shifted down.
Delete Ramp: Deletes the selected rate ramp.
Move Up: Shifts the selected rate ramp up one position.
Move Down: Shifts the selected rate ramp down one position.
Start Thickness: The thickness that triggers a timed ramp to a new rate. (Start
thickness should be greater for each subsequent ramp, and less than the final layer
thickness, otherwise the rate ramp is ignored.)