INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 17)

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SQS-242 Operating Manual
2.2.2 Edit Layer Parameters
4 Click Layer to display the layer parameters. See Figure 2-3 .
Figure 2-3 Layer tab
5 A Film is basically a material, plus the settings that will control its deposition.
Select Film >> Gold Sample.
6 We will be simulating a quartz sensor input that is controlling the deposition rate
of Output 1. Select Output >> Output 1.
7 Select Input >> Sensor(s).
8 Click SetPt, then adjust the rate setpoint to 10 Å/s.
9 Adjust Final Thickness to 1.000 kÅ.
NOTE: Time and Thickness Endpoints won’t be used for this example.
10 System Setup determines the physical inputs and outputs that are used and
displayed on the dialog box. For now use the Default system setup.
11 Manual Start causes this layer to wait for user input before beginning. An
optional user prompt is possible.
12 We won’t use any indexers for this example, so select None.