INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
NOTE: Omron CPM series PLCs number relays from 10.00 to 10.07, then 11.00
to 11.07. These correspond to Relays 1 to 16 on the I/O tab. Similarly,
inputs 0.00 to 0.11 on the Omron PLC correspond to inputs 1 to 12 on this
dialog box. See
Figure 3-22 I/O tab
Relay Events: The relay events dropdown box lists the deposition events that can
cause a relay output to be activated. To assign a deposition event to a relay, click
the Relay #, then select the desired event from the dropdown box. As you click
each Relay#, the dropdown will change to show its currently assigned event. A
description of each relay (output) event follows:
Source Shutter 1 to 6
These relays control the Shutter that covers your deposition source. At the
beginning of the deposit phase the relay will close its contacts. When the
deposit phase finishes the shutter relay contacts open.
Sensor Relays 1 to 8
These relays control sensor shutters. Their function depends on whether you
have single or dual sensors.
If Dual Sensor is not selected (i.e., a single sensor), the relay contacts close when
Shutter Delay phase is entered on a layer with the sensor enabled. As an example,
let’s say you have sensors 1 and 3 enabled for Film 1 and sensors 2 and 4 enabled
for Film 2. When you start Film 1 Shutter Delay phase, the contacts for Sensor
Relays 1 and 3 will close. When you start Film 2, these contacts open and the
contacts for Sensor Relays 2 and 4 will close when Shutter Delay is entered.