INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 65)

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SQS-242 Operating Manual
I Term . . . . . . . . . . . . . . . . . . . . . . . . 0 to 999.9 s
D Term . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9 s
Control Error. . . . . . . . . . . . . . . . . . . Ignore/Stop/Hold
Control Error Set . . . . . . . . . . . . . . . 0 to 30.0%
Feed Ramp Time . . . . . . . . . . . . . . . 0 to 30000 s
Feed Power . . . . . . . . . . . . . . . . . . . 0.0 to 100.0%
Feed Time . . . . . . . . . . . . . . . . . . . . 0 to 30000 s
Idle Ramp Time . . . . . . . . . . . . . . . . 0 to 30000 s
Idle Power . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0%
Tooling (Sensor 1 to 8) . . . . . . . . . . . 10.0 to 999.0
Max Power . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0%
Slew Rate . . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0%/s
Source Index (Pocket) . . . . . . . . . . . 0 to 15
Material Parameters
Name . . . . . . . . . . . . . . . . . . . . . . . . 12 characters
Density . . . . . . . . . . . . . . . . . . . . . . . .0.40 to 99.99 gm/cm
3
Z-Factor . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.900
Digital Inputs (available only with PLC option)
Start Process
Stop Process
Start Layer
Stop Layer
Start Next Layer
Zero Thickness
Force Final Thickness
Substrate Index Complete
Source Index Complete
Relay Outputs (available only with PLC option)
Source Shutter . . . . . . . . . . . . . . . . . 1 to 6
Sensor Shutter . . . . . . . . . . . . . . . . . 1 to 8
All Crystal Fail