INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 45)

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SQS-242 Operating Manual
Ramp 1: Ramp power sets the power level that is desired at the end of the ramp
phase, in % of full scale. Ramp time sets the time to ramp with a linear rate from
the initial power to the Ramp power. Soak time sets the time the output remains at
the ramp power level.
Ramp 2: Ramp 2 functions are the same as Ramp 1. Typically, Ramp 2 power is
set near the power level required to match the desired initial deposition rate.
Selecting the Ramp2 Power Auto checkbox stores the power over the last few
seconds of the deposit phase for this film. That value is used as the Ramp2 power
for the next run of the selected film.
Feed: The feed phase begins immediately after deposition is complete. It holds
output power at the level and time required to wire feed new material.
Idle: The Idle phase follows the Feed phase.
3.5.1.5 Source/Sensor Tab
The Source/Sensor tab controls the physical setup of the deposition system. See
Figure 3-13 .
Figure 3-13 Source/Sensor tab
Material: Selects the physical deposition material for the film selected on the
Layers tab. Selecting a material sets the Density and Z Factor, as defined in the
Edit Materials dialog box.