INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 80)

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SQS-242 Operating Manual
11 Set Active Layer #
2n Output n (1 to 6) Power (Manual Mode Only)
4n Map Sensor n to Output #
50 Set DataLog filename without extension (Stop mode only)
51 DataLog type (0=None, 1=Overwrite, 2=Append, 3=Run#)
52 DataLog Interval in seconds (set Bit 3 in Command 53 below)
53 DataLog Events (bit weighted integer)
Bit 0 End Deposit Phase
Bit 1 End Each Phase
Bit 2 I/O Event
Bit 3 Timed
Bit 8 Every Reading
Bit 9 Sensor Readings
Bit 10Analog Readings
5.8.3 Query/Update Layer
@QL;;;
@UL;;
NOTE: A value of zero sets/returns data on the current layer.
where is:
01
Film Name
Example: @UL;01;1MyFilm,New Film
(set Layer 1, MyFilm to
NewFilm)
02 Setpoint Å/s, V, or % Power
03 Start Thickness kÅ
04 Time SP mm:ss
05 Thickness SP kÅ
06 Start Mode 0/1
07 Substrate Index (obsolete) 0 to 15
08 # Layers in Process (query)
09 Start Prompt 250 characters or less
10 Phase of the requested output (query)
1n Ramp n Start Thickness, n=1 to 9 kÅ
2n Ramp n Ramp Time, n=1 to 9 mm:ss
3n Ramp n New Rate, n=1 to 9 Å/s
41 Layer Indexer 1 Index 0 to 15
42 Layer Indexer 2 Index 0 to 15
43 Layer Indexer 3 Index 0 to 15
44 Source Indexer Index 0 to 15
45 Input Type (Sensors=0, TimedPower=1, Analog1-4 = 2-5)
46 System Configuration
47 Source Indexer Done 0/1
48 Layer Indexer 1 Done 0/1
49 Layer Indexer 2 Done 0/1
50 Layer Indexer 3 Done 0/1