INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
Digital (relay) outputs
Relay 1 to 8 function . . . . . . . . . . . Determines the function of each of the digital
(relay) outputs (refer to
for details on wiring digital outputs). (See
.)
Table 4-4 Relay functions
Setting
Decription
0: Forced OFF
Relay is inactive
1: Forced ON
Relay is always active
2: Computer controlled
Relay is controlled with remote communications
3: Front panel buttons, top
Relay is toggled using Sensor 1 OPEN/CLOSE buttons
4: Front panel buttons, bottom
Relay is toggled using Sensor 2 OPEN/CLOSE buttons
5: Channel 1 source shutter
Relay activates Channel 1 source shutter
6: Channel 2 source shutter
Relay activates Channel 2 source shutter
7: Channel 1 substrate shutter
Relay activates Channel 1 substrate shutter
8: Channel 2 substrate shutter
Relay activates Channel 2 substrate shutter
9: Sensor 1 (X1) active
Relay activates Sensor 1 shutter
10: Sensor 2 (X2) active
Relay activates Sensor 2 shutter
11: Sensor 1 (X1) failed
Relay activates when Sensor 1 fails
12: Sensor 2 (X2) failed
Relay activates when Sensor 2 fails
13: Channel 1 setpoint time
Relay activates when Channel 1 setpoint time has elapsed
14: Channel 2 setpoint time
Relay activates when Channel 2 setpoint time has elapsed
15: Channel 1 setpoint thick
Relay activates when Channel 1 setpoint thickness has been
reached
16: Channel 2 setpoint thick
Relay activates when Channel 2 setpoint thickness has been
reached
17: Channel 1 good rate
Relay activates when Channel 1 rate is steady and within tolerance
18: Channel 2 good rate
Relay activates when Channel 2 rate is steady and within tolerance
19: Complement of #9
Relay is Normally Closed and opens to use Sensor 1
20: Complement of #10
Relay is Normally Closed and opens to use Sensor 2