INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 20)

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STM-2XM Operating Manual
1.4 Specifications
1.4.1 Measurement
Sensor Inputs . . . . . . . . . . . . . . . . . . 2
Compatible Sensors . . . . . . . . . . . . . Single/shuttered single or dual QCM sensor
Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.03 Hz @ 6 MHz
Reference Frequency Stability . . . . . ± 2 ppm
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.037 Å @ tooling/density = 100/1
Fundamental frequency = 6 MHz
Measurement Interval . . . . . . . . . . . 0.10 s
1.4.2 Film Parameters
Stored Films . . . . . . . . . . . . . . . . . . . 15
Name . . . . . . . . . . . . . . . . . . . . . . . . 8 characters, 0 to 9, A to Z, _ and [space]
Density . . . . . . . . . . . . . . . . . . . . . . . 0.4 to 99.99 g/cm 3
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 999.9%
Setpoint Thickness. . . . . . . . . . . . . . 0.000 to 999.999 kÅ
End Thickness . . . . . . . . . . . . . . . . . 0.000 to 999.999 kÅ
Use Backup Crystal . . . . . . . . . . . . . Yes/No
Setpoint Time . . . . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss
Deposit Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s
Coast Enable . . . . . . . . . . . . . . . . . . Yes/No
Crystal Life Minimum . . . . . . . . . . . . 0 to 99%
Force Crystal Fail . . . . . . . . . . . . . . . Yes/No
Temporal Average . . . . . . . . . . . . . . 1 to 50
Good Rate Tolerance . . . . . . . . . . . . 0 to 50