INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 48)

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STM-2XM Operating Manual
SMDP address. . . . . . . . . . . . . . . . . .Serial communication mode for STM-2XM. If
the SMDP address is 16, STM-2XM uses
RS-232 electrical signaling; otherwise
STM-2XM uses RS-485 signaling.
3.2.1.3 Setup Parameters
CAUTION
Changes in the Setup menu occur immediately. Relays
and analog outputs can activate unexpectedly during
programming.
Sensor setup . . . . . . . . . . . . . . . . . Main parameter that effects the
choices/modes available (see Table 3-2 ).
Tooling, X1:SRC1 . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 1 and Sensor 1 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
Tooling, X2:SRC1 . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 1 and Sensor 2 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
NOTE: In independent chambers, set this
value to zero.
Table 3-2 Sensor setup parameter
Sensor Setup Available modes Rate sampling
capable
Backup
capable
1:Single
unshuttered
Simple No No
2:Single
shuttered
Simple Yes No
3:Dual w/single
shutter
Simple Yes Yes
4:Dual
unshuttered
Simple, Averaging, Alloy, Independent No If mode is
Simple
5:Dual w/dual
shutters
Simple, Averaging, Alloy, Independent Yes If mode is
Simple