INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 46)

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STM-2XM Operating Manual
Temporal Average . . . . . . . . . . . . . Number of measurement samples to
average as the effective rate. More samples
yield a more accurate rate, however, rate and
thickness will not update as quickly at higher
sampling rates.
The effective frequency accuracy is 0.03 Hz
per measurement divided by the square root
of the number of temporal average samples.
Good Rate Tolerance(%) . . . . . . . . Set as a percentage of rate deviation. When
set for good rate, a relay will activate only
within tolerance, when the good rate
condition is true.
For example, if Good Rate Tolerance is set to
10% and the target rate is set to 10 Å/s, when
the rate is between 9 and 11 Å/s (10%), the
good rate relay would be active.
NOTE: A relay must be programmed to use
this feature.
3.2.1.2 System Settings
Operational Mode. . . . . . . . . . . . . . Sets STM-2XM mode of operation (see
section 3.3, STM-2XM Operating Modes, on
page 3-17
). (See Table 3-1 .)
Table 3-1 Modes of operation
Mode Description Notes
Simple X1 Single film, single sensor Sensor 1 active only. Analog/shutter outputs
selected by changing active source.
Simple X2 Single film, single sensor Sensor 2 active only. Analog/shutter outputs
selected by changing active source.
Backup Single film, dual sensors Crystal switching mode.
Averaging Single film, two sensors spatially
averaged Used for large chambers or systems with a
moving substrate.
Alloy Two films codeposited Codeposition of two materials onto a
substrate at the same time.
Independent Two films cluster deposition Allows STM-2XM to be used as two separate
instruments. Recommended for cluster tools
and research systems.