INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
Relay 1 to 8 . . . . . . . . . . . . . . . . . . . Determines the function of each of the digital
(relay) outputs (refer to
for details on wiring digital outputs). (See
.)
Table 3-5 Relay functions
Setting
Decription
None
Relay is inactive
Forced ON
Relay is always active
Remote
Relay is controlled with remote communications
Ch 1 FP Keys
Relay is toggled using Sensor 1 OPEN/CLOSE
buttons
Ch 2 FP Keys
Relay is toggled using Sensor 2 OPEN/CLOSE
buttons
Srce 1 Shtr
Relay activates Channel 1 source shutter
Srce 2 Shtr
Relay activates Channel 2 source shutter
Subs 1 Shtr
Relay activates Channel 1 substrate shutter
Subs 2 Shtr
Relay activates Channel 2 substrate shutter
Sens 1 Shtr
Relay activates Sensor 1 shutter
Sens 2 Shtr
Relay activates Sensor 2 shutter
Xtal 1 Fail
Relay activates when Sensor 1 fails
Xtal 2 Fail
Relay activates when Sensor 2 fails
Stpt 1 Time
Relay activates when Channel 1 setpoint time has
elapsed
Stpt 2 Time
Relay activates when Channel 2 setpoint time has
elapsed
Stpt 1 Thik
Relay activates when Channel 1 setpoint thickness
has been reached
Stpt 2 Thik
Relay activates when Channel 2 setpoint thickness
has been reached
Ch1 Rate OK
Relay activates when Channel 1 rate is steady and
within tolerance
Ch2 Rate OK
Relay activates when Channel 2 rate is steady and
within tolerance
Xtl 1 N.C.
Relay is Normally Closed and opens to use Sensor
1
Xtl 2 N.C.
Relay is Normally Closed and opens to use Sensor
2