INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 109)

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STM-2XM Operating Manual
2 CFID_FILMDENS Density Range 0.40 to 99.99 g/cm 3 1.00
3 CFID_FILMZRAT Z-Ratio Range 0.100 to 9.999 1.000
4 CFID_FILMTOOL Tooling Range 10.0 to 999.9% 100.0
5 CFID_FILMSETMAS Setpoint Mass Range 0.00 to 9999.99 µg 0.00
6 CFID_FILMSETTHK Setpoint Thickness Range 0.000 to 999.999 kÅ 0.000
7 CFID_FILMENDMAS End Mass Range 0.00 to 9999.99 µg 0.000
8 CFID_FILMENDTHK End Thickness Range 0.000 to 999.999 kÅ 0.000
9 CFID_FILMUBX Use backup crystal 0 - False/No
1 - True/Yes No
10 CFID_FILMSETPTM Setpoint Time Range 0:00:00 to 9:59:59 h:mm:ss 0:00:00
11 CFID_FILMRATEM Deposit rate in µg/cm²s Range 0.00 to 99.99 µg/s 0.00
12 CFID_FILMRATET Deposit rate in Å/s Range 0.0 to 999.9 Å/s 0.0
13 CFID_FILMSDLY Shutter delay mode 0 - False/No
1 - True/Yes No
14 CFID_FILMSPLMOD Rate sampling mode 0 - False/No
1 - True/Yes No
15 CFID_FILMSPLIVL Rate Sampling interval
when Rate Sample On Range 0:00:00 to 9:59:59 h:mm:ss 0:00:00
16 CFID_FILMSPLDWL Rate Sampling dwell Range 0:00:00 to 9:59:59 h:mm:ss 0:00:00
17 CFID_FILMTMPWR Coast - Time/Power
enable 0 - False/No
1 - True/Yes No
18 CFID_FILMXLMIN Crystal life minimum Range 0 to 99% 0
19 CFID_FILMFORCEF Force fail if crystal life <
min
0 - False/No
1 - True/Yes No
20 CFID_FILMAVGSMP Temporal averaging #
samples filter depth
Range 1 to 50 1
21 CFID_FILMGOOD
RATETOL
Good Rate Tolerance
percent value Range 0 to 50% 0
Table 5-4 I/J command (continued)
# Command Structure Name Comment Default