INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 72)

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STM-2XM Operating Manual
Tooling X1:S2 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 2 and Sensor 1 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
NOTE: For independent chambers, set this
value to zero.
Tooling X2:S2 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 2 and Sensor 2 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
Weight Ratio . . . . . . . . . . . . . . . . . . Available only in spatial averaging mode.
This parameter describes the percentage of
time the substrate is near Sensor 1. In
moving substrate systems, if the substrate
spends more time near one sensor than the
other, this needs to be accounted for in the
computations. If the substrate spends 90% of
time near Sensor 1, this parameter should be
programmed for 90%. If the substrate is
fixed, the default value is 50%.
Analog outputs
Analog output mode . . . . . . . . . . . 0: Thickness, 1: Mass