1 analog output function, Section – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
5.8.4.1 Analog Output Function
anout_none . . . . . . . . . . . . . . . . . . . 0
Zero volts
anout_pos . . . . . . . . . . . . . . . . . . . . 1
Positive full scale
anout_neg . . . . . . . . . . . . . . . . . . . . 2
Negative full scale
anout_remote . . . . . . . . . . . . . . . . . . 3
Computer controlled
anout_rdev1K. . . . . . . . . . . . . . . . . . 4
Rate deviation, Channel 1, 1 kÅ/s or 10.00 µg
full scale
anout_rdev1T . . . . . . . . . . . . . . . . . 5
Rate deviation, Channel 1, 10 Å/s or 0.10 µg
full scale
anout_rate1K . . . . . . . . . . . . . . . . . . 6
Rate, Channel 1, 1 kÅ/s or 10.00 µg full scale
anout_rate1T . . . . . . . . . . . . . . . . . . 7
Rate, Channel 1, 10 Å/s or 0.10 µg full scale
anout_thick1 . . . . . . . . . . . . . . . . . . 8
Thickness or mass plot (modal), Channel 1,
sawtooth mode 0 to 999 Å or 0 to 9.99 µg/cm²
anout_thick1M . . . . . . . . . . . . . . . . . 9
Thickness or mass plot(modal), Channel 1
magnified, sawtooth mode 0 to 99.9 Å or 0 to
0.999 µg/cm²
anout_rdev2K. . . . . . . . . . . . . . . . . . 10
Rate deviation, Channel 2, 1 kÅ/s or 10.00 µg
full scale
anout_rdev2T . . . . . . . . . . . . . . . . . . 11
Rate deviation, Channel 2, 10 Å/s or 0.10 µg
full scale
anout_rate2K . . . . . . . . . . . . . . . . . . 12
Rate, Channel 2, 1 kÅ/s or 10.00 µg full scale
anout_rate2T . . . . . . . . . . . . . . . . . . 13
Rate, Channel 2, 10 Å/s or 0.10 µg full scale