INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 44)

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STM-2XM Operating Manual
3.2.1.1 Edit Film
All parameters are listed, but during actual operation STM-2XM will show only the
parameters that are relevant to its configuration and mode.
Name . . . . . . . . . . . . . . . . . . . . . . . . Name of the film, displayed on the monitor
screen.
Density . . . . . . . . . . . . . . . . . . . . . . Density of the film material. Used to
accurately calculate thickness. The density
of common materials is found in
Appendix A,
Material Table .
NOTE: Density is not used in Mass mode.
Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . Z-Ratio of the film material. Used to
accurately calculate thickness. The Z-Ratio
of common materials is found in
Appendix A,
Material Table .
Additional Tooling . . . . . . . . . . . . . Tooling applied in addition to the tooling in
the setup menu.
NOTE: This only affects the film being edited
and not all films.
Setpoint Thickness . . . . . . . . . . . . Thickness/mass at which the setpoint
thickness relay (if programmed) will close.
NOTE: Each time a film is started, the
setpoint thickness condition is
cleared, and will be activated when
the thickness of the specific film (not
necessarily the total displayed
thickness) reaches the setpoint.
End Thickness . . . . . . . . . . . . . . . . Thickness/mass at which the deposit state
automatically terminates.
NOTE: Each time a film is started, the end
thickness condition is cleared. This
will be activated when the thickness
of the specific film (not necessarily
the total displayed thickness)
reaches the setpoint.
Use Backup Xtal . . . . . . . . . . . . . . . Available in Backup Mode
Allows the sensor to switch automatically if
the active crystal fails.
Setpoint Time . . . . . . . . . . . . . . . . . Thickness/mass at which the setpoint time
relay (if programmed) will close.