INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 59)

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STM-2XM Operating Manual
3.4.4 Rate Sampling
STM-2XM rate sampling allows for long depositions by limiting the time the sensor
is exposed to the evaporant. STM-2XM samples rate for a period of time, then
closes the sensor shutter and assumes the rate is constant. STM-2XM
continuously opens and closes the sensor shutter according to the times
programmed. While depositing, when STM-2XM closes the sensor shutter,
STM-2XM enters a HOLD phase, and the locked-in rate blinks. STM-2XM will not
enter the HOLD phase unless the measured rate is at least 50% of the
programmed deposit rate for the film or 0.5 Å/s (whichever is greater). This
prevents STM-2XM from jumping into the HOLD phase before the rate has been
established.
3.5 Film States
FAIL TPW . . . . . . . . . . . . . . . . . . . . Crystal failed; completed time power
(thickness was incremented at last known
rate and shutter was held open until End
Thickness was reached).
X FAIL . . . . . . . . . . . . . . . . . . . . . . . Crystal failed; film was aborted; all shutters
are closed. If the crystal recovers while in the
X FAIL phase, STM-2XM will transition to the
Ready phase.
READY. . . . . . . . . . . . . . . . . . . . . . . Sensor shutters are open, but all other
shutters are closed. Monitor is ready; press
OPEN to open source/substrate shutters.
SHUT DLY . . . . . . . . . . . . . . . . . . . . Sensor and source shutters are open but
substrate shutter is closed. This allows a rate
to be established. Pressing OPEN will
transition the film to Deposit (opening the
substrate shutter).
COAST. . . . . . . . . . . . . . . . . . . . . . . Crystal failed, but STM-2XM is incrementing
thickness at the last known rate and keeping
the source/substrate shutters open. Once
the end thickness is reached, the film will
transition to the FAIL_TPW state.
DEPOSIT . . . . . . . . . . . . . . . . . . . . . All shutters are open and STM-2XM is
monitoring the evaporant onto the target.
This is the normal mode.