INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 107)

5 - 27
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4-
61
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P1
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STM-2XM Operating Manual
suprlyfn_good_rate1. . . . . . . . . . . . . 17
Channel 1 rate within bounds
suprlyfn_good_rate2. . . . . . . . . . . . . 18
Channel 2 rate within bounds
suprlyfn_XTL1shutNot . . . . . . . . . . . 19
Operates sensor shutter when Sensor 1 is
not active when using backup A/B shutter
arrangement or when air/bellows/A/B choice
is backwards
suprlyfn_XTL2shutNot . . . . . . . . . . . 20
Operates sensor shutter when Sensor 2 is
not active when using backup A/B shutter
arrangement or when air/bellows/A/B choice
is backwards
5.8.4.3 Input Functions
supinpfn_none . . . . . . . . . . . . . . . . . 0
Ignore the input
supinpfn_zerotk . . . . . . . . . . . . . . . . 1
Zero the thickness
supinpfn_open . . . . . . . . . . . . . . . . . 2
Open specific to a channel
supinpfn_close . . . . . . . . . . . . . . . . . 3
Close specific to a channel
supinpfn_xtalsel . . . . . . . . . . . . . . . . 4
Select crystal as active, backup mode only
supinpfn_fnlthktrg . . . . . . . . . . . . . . . 5
Trigger final thick per Input channel
supinpfn_fnlthktrgAll . . . . . . . . . . . . . 6
Trigger final thick to both channels
supinpfn_alloy. . . . . . . . . . . . . . . . . . 7
Allow sync, channel non-specific