INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 114)

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STM-2XM Operating Manual
5.8.11 Command: Q
Command Type . . . . . . . . . . . . . . . . Status
Command Structure . . . . . . . . . . . . . QTWIN_class, Indx X
Syntax . . . . . . . . . . . . . . . . . . . . . . . Qn,X
Description . . . . . . . . . . . . . . . . . . . . Displays Diagnostic information, where n is 1
to 21 and X is an index with Channel 1 as 0
and Channel 2 as 1.
Parameters. . . . . . . . . . . . . . . . . . . . (See Table 5-7 .)
Table 5-7 Q command
# Command Structure Comments Values
1 QTWIN_CH_T_MASS Channel total mass µg
2 QTWIN_CH_T_THIK Channel total thickness kÅ
3 QTWIN_XRAWF1 Raw frequencies both
channels Hz
4 QTWIN_XAVGF1 Last known good averaged
frequencies Hz
5 QTWIN_XLIFE Last known good crystal life %
6 QTWIN_XRATEM Last known good mass rate µg/cm²s
7 QTWIN_XRATET Last known good thickness
rate Å/s
8 QTWIN_XMASS Accumulated mass µg/cm²
9 QTWIN_XTHIK Accumulated thickness Å
10 QTWIN_XSTAT Raw status (XtlStat_class) Value 0 to 4 (see section
5.8.11.1 )
11 QTWIN_XSTAT2 Raw status (XtlStat2_class) Value 0 to 2 (see section
5.8.11.2 on page 5-36 )
12 QTWIN_XACHNL Channel that Index sensor is
assigned to 0 - Channel 1
1 - Channel 2
13 QTWIN_SHTSRC Source shutters 1 - True
Source shutter is open
0 - False
Source shutter is closed
Channels not being used will
return 0.
This is the logical state of the
process, not the actual I/O
relay state