4 runtime screen – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
3.1.4 Runtime Screen
Figure 3-7 STM-2XM Runtime screen component status
Deposition Rate
Substrate Thickness
or Mass
Film State
Set Point
Indicators
Real-Time Chart
Context-Based
Help
Film No.:Film Name
Upper Chart Bound
Chart Type
Lower Chart Bound
Indicates Active Sensor
Sensor Shutter Closed
Sensor Shutter Open
Crystal Life (Frequency-Based)
Deposit Phase Time
Substrate Shutter
Source Shutter
Shutter Closed
Shutter Open
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