INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
8 CSID_SUP_ANLGMD
Analog mode (mass/thick)
sysdisp_class
0 - Thickness (Å)
1 - Mass (µgcm)
9 CSID_SUP_ALOG1 Analog
function
1
anout_class value:
DACINX_one_A offset
access
Value 0 to 27 (see
)
10 CSID_SUP_ALOG2
Analog function 2
anout_class value:
DACINX_two_B offset
access
Value 0 to 27 (see
)
11 CSID_SUP_ALOG3 Analog
function
3
anout_class value:
DACINX_three_C offset
access
Value 0 to 27 (see
)
12 CSID_SUP_ALOG4 Analog
function
4
anout_class value:
DACINX_four_D offset
access
Value 0 to 27 (see
)
13 CSID_SUP_RLY1P1
Relay 1 function
Value 0 to 20 (see
)
14 CSID_SUP_RLY1P2
Relay 2 function
Value 0 to 20 (see
)
15 CSID_SUP_RLY1P3
Relay 3 function
Value 0 to 20 (see
)
16 CSID_SUP_RLY1P4
Relay 4 function
Value 0 to 20 (see
)
17 CSID_SUP_RLY2P1
Relay 5 function
Value 0 to 20 (see
)
18 CSID_SUP_RLY2P2
Relay 6 function
Value 0 to 20 (see
)
19 CSID_SUP_RLY2P3
Relay 7 function
Value 0 to 20 (see
)
20 CSID_SUP_RLY2P4
Relay 8 function
Value 0 to 20 (see
)
21 CSID_SUP_INP1P1
Input function Channel 1 #1 Value 0 to 7 (see
)
22 CSID_SUP_INP1P2
Input function Channel 1 #2 Value 0 to 7 (see
)
23 CSID_SUP_INP1P3
Input function Channel 1 #3 Value 0 to 7 (see
)
24 CSID_SUP_INP1P4
Input function Channel 1 #4 Value 0 to 7 (see
)
Table 5-3 E/F command (continued)
#
Command Structure
Comments
Values