INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 56)

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STM-2XM Operating Manual
3.3.4 Alloy
In alloy mode, two different materials are deposited onto the substrate at the same
time. STM-2XM associates a material with a sensor. Make sure to shield the
sensors so that each sensor monitors only one source.
In alloy mode, Sensor 1 (X1) is associated with Channel/Source 1 (top line on the
Runtime screen) and Sensor 2 (X2) is associated with Channel 2/Source 2 (bottom
line on the Runtime screen) (see
Figure 3-12 ).
In alloy mode, STM-2XM links the source or substrate shutters together, so that the
evaporants are properly codeposited on the substrate. Each channel (or both) may
still have a shutter delay phase. In this case, when the channel(s) are programmed
with shutter delay, they both enter the deposit phase at the same time by pressing
either of the two OPEN buttons. Also, each channel may independently be
programmed for rate sampling.
In alloy mode, the setpoint thickness of each source channel is independent.
The Ratio Indicator displays the ratio as measured at the instant, not an overall
ratio.
NOTE: The chart is not available in Alloy Mode.
Figure 3-12 Alloy mode
Sensor Shutter
Source
Sensor
Source
Substrate
Chamber
Substrate Shutter
Source Shutters
Total Substrate
Thickness
Film No.:Film Name
Film No.:Film Name
Deposit Rate for
Source 1
Deposit Rate for
Source 2
Ratio Indicator
(Based on
current rate)