3 basic vacuum system components – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
2.3 Basic Vacuum System Components
Figure 2-6 Basic vacuum system components
Substrate
The substrate is the object being coated.
Source
The source is the object that emits the evaporant. STM-2XM provides support for
two sources.
Sensor
The sensor is the component that detects the evaporant. The sensor can only
detect evaporant that accumulates on the sensor crystal. To account for differences
in evaporant between the sensor and substrate, tooling adjustments are used (see
). STM-2XM provides support for two sensors.
Source shutter (optional)
The source shutter blocks the evaporant stream from the source. With the source
shutter closed, the evaporant from the source cannot reach the substrate or the
sensors. The front panel shutter buttons and the End Thickness setpoint activate
the source shutter.
Substrate
Substrate Shutter
Source
Shutter
Chamber
Oscillator
Source
Power
Supply
Sensor
Sensor
Shutter
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