INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
anout_thick2 . . . . . . . . . . . . . . . . . . . 14
Thickness or mass plot(modal), Channel 2,
sawtooth mode 0 to 999 Å or 0 to 9.99 µg/cm²
anout_thick2M . . . . . . . . . . . . . . . . . 15
Thickness or mass plot(modal), Channel 2
magnified, sawtooth mode 0 to 99.9 Å or 0 to
0.999 µg/cm²
anoutCom_rate1_5C . . . . . . . . . . . . 16
Rate, Channel 1, 500 Å/s, 5.00 µg full scale
anoutCom_rate1_2C . . . . . . . . . . . . 17
Rate, Channel 1, 200 Å/s, 2.00 µg full scale
anoutCom_rate1_1C . . . . . . . . . . . . 18
Rate, Channel 1, 100 Å/s, 1.00 µg full scale
anoutCom_rate1_5X . . . . . . . . . . . . 19
Rate, Channel 1, 50 Å/s, 0.50 µg full scale
anoutCom_rate1_2X . . . . . . . . . . . . 20
Rate, Channel 1, 20 Å/s, 0.20 µg full scale
anoutCom_rate2_5C . . . . . . . . . . . . 21
Rate, Channel 2, 500 Å/s, 5.00 µg full scale
anoutCom_rate2_2C . . . . . . . . . . . . 22
Rate, Channel 2, 200 Å/s, 2.00 µg full scale
anoutCom_rate2_1C . . . . . . . . . . . . 23
Rate, Channel 2, 100 Å/s, 1.00 µg full scale
anoutCom_rate2_5X . . . . . . . . . . . . 24
Rate, Channel 2, 50 Å/s, 0.50 µg full scale
anoutCom_rate2_2X . . . . . . . . . . . . 25
Rate, Channel 2, 20 Å/s, 0.20 µg full scale
anoutCom_rdev1_1C . . . . . . . . . . . . 26
Rate deviation, Channel 1, 100 Å/s, 1.00 µg
anoutCom_rdev2_1C . . . . . . . . . . . . 27
Rate deviation, Channel 2, 100 Å/s, 1.00 µg