INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 22)

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PN
07
4-
61
4-
P1
A
STM-2XM Operating Manual
Digital Output Functions . . . . . . . . . . Manual (front panel)
Source shutter
Substrate shutter
Sensor shutter
Crystal fail
Setpoint time
Setpoint thick
Forced active
Controlled via serial communications
Rate is steady and within tolerance
Analog Outputs. . . . . . . . . . . . . . . . . 4
Analog Output Functions . . . . . . . . . Rate:
Rate 1000 Å/s, 10.00 µg scale
Rate 10.0 Å/s, 0.10 µg scale
Rate deviation:
Rate deviation 1000 Å/s, 10.00 µg scale
Rate deviation 10.0 Å/s, 0.10 µg scale
Thickness:
Thickness recorder 999 Å scale
Thickness recorder 99.9 Å scale
Disabled
Controlled via serial communications
Fixed positive/negative full scale
Analog Output Rating. . . . . . . . . . . . -10 to +10 V, 10 mA
Relay Rating. . . . . . . . . . . . . . . . . . . up to 48 V (dc) • V (ac), 2 A
1.4.5 Power
Rated Supply Voltage. . . . . . . . . . . . 100 to 240 V (ac) ± 10%, 50/60 Hz, 2.5 VA
Fuse Rating . . . . . . . . . . . . . . . . . . . 1 A 250 V, 5 x 20 mm, Fast-acting
Mains Power Cable Rating
STM-2XM-G1 . . . . . . . . . . . . . . . 10 A 125 V
STM-2XM-G2 . . . . . . . . . . . . . . . 10 A 250 V
Power Consumption. . . . . . . . . . . . . less than 10 W
Overvoltage . . . . . . . . . . . . . . . . . . . Category II
Temporary Overvoltage
Short Term . . . . . . . . . . . . . . . . . 1200 V, < 5 s
Long Term . . . . . . . . . . . . . . . . . 250 V, > 5 s