5 independent, Source 1 related source 2 related – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
3.3.5 Independent
In independent mode, STM-2XM acts like two separate simple monitors. The
source shutters are operated independently, and the films can be deposited
independently. The two channels are completely independent. Sensor 1 (X1) is
associated with Channel/Source 1 (top line on the screen) and Sensor 2 (X2) is
associated with Channel 2/Source 2 (bottom line on the screen)
NOTE: The chart is not available in Independent Mode. The setpoint indicators on
) are also not available
in Independent mode.
Figure 3-13 Independent mode
Source Shutter
Sensor
Chamber
Sensor Shutter
Source
Substrate Shutter
Substrate
Source Shutter
Sensor
Chamber
Sensor Shutter
Source
Substratre Shutter
Substrate
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