INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 106)

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STM-2XM Operating Manual
5.8.4.2 Relay Functions
suprlyfn_none. . . . . . . . . . . . . . . . . . 0
Relay always off
suprlyfn_onhard . . . . . . . . . . . . . . . . 1
Relay always on
suprlyfn_remote . . . . . . . . . . . . . . . . 2
Computer controlled
suprlyfn_fpkeys1 . . . . . . . . . . . . . . . 3
Front panel Channel 1
suprlyfn_fpkeys2 . . . . . . . . . . . . . . . 4
Front panel Channel 2
suprlyfn_srcshut1 . . . . . . . . . . . . . . . 5
Source shutter Channel 1
suprlyfn_srcshut2 . . . . . . . . . . . . . . . 6
Source shutter Channel 2
suprlyfn_substshut1 . . . . . . . . . . . . . 7
Substrate shutter Channel 1
suprlyfn_substshut2 . . . . . . . . . . . . . 8
Substrate shutter Channel 2
suprlyfn_XTL1shut . . . . . . . . . . . . . . 9
Operates sensor shutter when Sensor 1 is
active
suprlyfn_XTL2shut . . . . . . . . . . . . . . 10
Operates sensor shutter when Sensor 2 is
active
suprlyfn_xfail1 . . . . . . . . . . . . . . . . . 11
Operates when Sensor 1 is in state other
than XtlStat_OK/XtlStat_OFF
suprlyfn_xfail2 . . . . . . . . . . . . . . . . . 12
Operates when Sensor 2 is in state other
than XtlStat_OK/XtlStat_OFF
suprlyfn_setpt_time1 . . . . . . . . . . . . 13
Channel 1 timer triggered
suprlyfn_setpt_time2 . . . . . . . . . . . . 14
Channel 2 timer triggered
suprlyfn_setpt_thick1 . . . . . . . . . . . . 15
Channel 1 setpoint thickness triggered
suprlyfn_setpt_thick2 . . . . . . . . . . . . 16
Channel 2 setpoint thickness triggered