3 stm-2xm operating modes, 1 simple – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
3.3 STM-2XM Operating Modes
3.3.1 Simple
In simple mode, STM-2XM can read one sensor and can control a shutter for one
source. The deposition process is a single material per layer.
Figure 3-9 Simple mode
Source Shutter
Sensor
Chamber
Sensor Shutter
Source
Substrate Shutter
Substrate
Notice that one sensor
is off.
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