INFICON Composer Gas Concentration Controller - Manual (Page 189)

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Composer Operating Manual
Diluent
The gas used for dilution of the bubbler flow to produce the desired
concentration and flow.
DVM
Digital Volt Meter; an instrument for precision measurement of voltage.
Drive Microphone
The electroacoustic element that is used to amplitude modulate the
diaphragm and indirectly the gas in the resonant chamber
EDMIn
ethyldimethylindium
Enunciator
A basic display device providing a message or warning to the user.
External Control (state)
The machine state that exists when the reactor is directly generating
the voltage to be applied to the bubbler’s MFC in Bulk Flow Control
mode.
Fluence
The number of particles (or molecules) passing across a unit area.
Commonly expressed as the number per second.
Fundamental Mode
The lowest frequency standing wave possible in a resonant structure.
Gauge (pressure)
The pressure of a gas measured relative to standard atmospheric
pressure.
Head Space
The empty space above the solid or liquid precursor in a bubbler.
Helmholtz Resonator
A type of acoustic resonator structure that has two chambers
connected by a restricted neck. It is analogous in shape to a dumbbell.
Instrument System
The complete measurement system consisting of the Controller, the
Transducer, Interconnection Cable and Power Supply
Interconnection Cable
That portion of this measurement system that electrically connects the
Controller and the Transducer.
Internal Control (state)
The machine state that exists when the Composer is actively
manipulating the bubbler’s MFC in the Bulk Flow Control mode.