INFICON Composer Gas Concentration Controller - Manual (Page 187)

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Composer Operating Manual
Chapter 10
Glossary
Absolute (Pressure)
The pressure of a gas measured relative to a perfect vacuum.
Algorithm
A mathematical procedure.
Ambient
The conditions of the environment, such as temperature and pressure
that surround a body or object, especially a condition that affects the
body or object but is not affected by it.
Amplitude Track Mode
This instrument system’s method of measurement that Curve Fits the
resonance’s shape to determine the exact frequency of the maximum
amplitude.
AMU
Atomic Mass Unit
Back Pressure Controller
An apparatus used to maintain the pressure in the delivery lines to the
reactor.
Bubbler
The common name for the bottle used to contain the source of solid or
liquid precursor.
Bulk Flow
The product of the measured weight fraction and bubbler flow rate.
Bulk Flow Control
The mode of Composer operation that varies the flow through the
bubbler to maintain the target bulk flow.
Concentration
A measure of the comparative population of components in a mixture,
see Mole Fraction.
Concentration Control
The mode of Composer operation that varies bubbler and dilution flow
to maintain the target concentration.
Controller
The electronic portion of the instrument system. Includes the
transducer’s conditioning and controlling circuits, microprocessors for
determining the speed of sound (frequency), analog input and output
signals and system status indicators.