INFICON Composer Gas Concentration Controller - Manual (Page 112)

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Composer Operating Manual
CONCENTRATION TARGET . . . . . The desired concentration of precursor in
terms of mole %. Also used to multiply the
flow read on the CONTROL IN connector to
form the Bulk Flow Target.
PROCESS GAIN . . . . . . . . . . . . . . The numerical value of the Processes’ gain
(change in the concentration (mole %)
divided by the change in the manipulated
variable (volts).
DEAD TIME . . . . . . . . . . . . . . . . . . The numerical value of the processes’
dead time (sec).
TIME CONSTANT . . . . . . . . . . . . . The numerical value of the processes’ time
constant (sec).
RELAY LIMIT . . . . . . . . . . . . . . . . A parameter that defines a tolerance band
around the Concentration Target or Bulk
Flow Target in terms of an absolute
concentration or flow. Works in conjunction
with the @CONCENTRATION relay
FUZZY . . . . . . . . . . . . . . . . . . . . . . If set to yes (Y) the “fuzzy logic” control
loop is activated, otherwise normal PID
control is executed.
CELL TEMPERATURE . . . . . . . . . The parameter that allows the user to set
the transducer’s resonant chamber’s
temperature (°C). Allowable range is 25 to
65 °C.
CARRIER MW . . . . . . . . . . . . . . . . The parameter representing the molecular
weight of the lighter (or carrier) gas.
Allowable range
is 1 - 1000.
CARRIER γ . . . . . . . . . . . . . . . . . . The parameter representing the specific
heat ratio of the lighter (or carrier) gas.
PRECURSOR MW . . . . . . . . . . . . . The parameter representing the molecular
weight of the heavier (or precursor) gas.
Allowable range is 1-1000.0.
PRECURSOR γ . . . . . . . . . . . . . . . The parameter representing the specific
heat ratio of the heavier (or precursor) gas.
MFC RANGE BUBBLER . . . . . . . . The parameter representing the full flow
range of the mass flow controller that
regulates the flow through the bubbler
(sccm).